ISSN:
0741-0581
Keywords:
Electron probe beam diameter
;
Digital image processing
;
Online digital computer
;
Life and Medical Sciences
;
Cell & Developmental Biology
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Natural Sciences in General
Notes:
A method for the measurement of electron probe beam diameter by digital image processing has recently been published. The purpose of the present report is to describe the development of an automatic system for beam diameter measurement. To complete this system, a method based on a theory which combines automation and high-resolution conditions is proposed. In practice, the beam diameter is measured from the STEM image of a crystalline hole in a gold thin film, utilizing an on-line computer system equipped with newly developed digital processing programs linked to a SEM in the transmission mode. The functions of the programs include statistical processing, matching, noise removal, interpolation, selection, and rotation. By combining these functions, the scanning beam diameter is accurately measured, in spite of difficulties, under most electron microscope operating conditions. The user simply appoints the edge included in the STEM image.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/jemt.1060030204
