ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
In this paper we report some results obtained in the analysis of multilayer samples employed in VLSI and ULSI microelectronic technology by means of hot electron gas SNMS (sputtered neutral mass spectrometry) and MCs+ SIMS.A direct comparison of molecular ion SIMS with a post-ionization technique pushed to its limits is presented.A discussion in terms of dynamic range, optimum sensitivity and depth resolution is given.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740181105