ISSN:
0142-2421
Schlagwort(e):
Chemistry
;
Polymer and Materials Science
Quelle:
Wiley InterScience Backfile Collection 1832-2000
Thema:
Physik
Notizen:
The surface composition of a solid may vary considerably from the bulk composition of the material. For example, surface contaminants such as carbon, oxygen, sulphur and chlorine can be present as a thin overlayer. Recently, procedures have been developed that enable determination of the composition, thickness and surface coverage of a thin overlayer on a surface from AES spectra. In the present work, a similar procedure has been developed for analysis of thin overlayers by XPS. The calculation deals with two possible situations, the overlayer either does or does not contain elements that occur in the underlying material. The composition, thickness and surface coverage of a number of overlayers have been investigated, including the surface contaminant layers on amorphous silicon films, a series of amorphous silicon nitride films with varying atomic ratios of silicon and nitrogen and vacuum-deposited gold films on amorphous silicon nitride substrates.
Zusätzliches Material:
3 Ill.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1002/sia.740170605
