ISSN:
1432-0630
Schlagwort(e):
PACS: 77.55.+f; 77.80.Dj; 77.80.Fm
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract. New methods for fabricating highly 〈001〉-oriented and complete 〈111〉-textured Pb(Ta0.05Zr0.48Ti0.47)O3 (PTZT) films on Pt/TiO2/SiO2/Si(001) substrates by pulsed-laser deposition have been developed using conductive oxide La0.25Sr0.75CoO3 and SrRuO3 electrodes. The 〈001〉-preferred orientated PTZT ferroelectric capacitor was not subjected to loss of its polarization after 1×1010 switching cycles at an applied voltage of 5 V and a frequency of 1 MHz, and the 〈111〉-textured PTZT film capacitor retains 94.7% of its polarization after 1.5×1010 switching cycles at 5 V and 50 kHz. The PTZT capacitors using these conductive oxide electrodes have low leakage current dominated by Schottky field emission mechanism.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/s003390051499
