ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
At medium pressure (density of neutral atoms from 1021 to 1023 m−3) plasma was generated by an rf electric field of 27.12 MHz. The plasma impedance has been measured in He, Ne, Ar, and Kr. In order to avoid errors by stray reactances, the power input line was treated as a four-terminal network. The corresponding coefficients were determined by measurements with known load impedances instead of the plasma.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1142897