ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Electrical discharges in He, Ne, Ar, and Kr at medium pressure (density of neutral atoms from 1021 to 1023 m−3), sustained by an rf electric field of 27.12 MHz, are investigated. Electron temperature and plasma density were measured with a Langmuir probe at 8, 13, and 20 W total discharge power. The plasma density was found to increase with the input power, whereas the electron temperature depends only weakly on the input power.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1142896
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