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Interface roughness characterization using x-ray standing waves (1994)

Kawamura, Tomoaki ; Takenaka, Hisataka

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 75 (1994), S. 3806-3809

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: An x-ray standing wave technique is used to characterize the interface roughness of multilayer structures. To include the interface roughness effect, standing wave fields of x-rays in multilayers are described in terms of a modified optical matrix. Analysis of a Ni/C multilayer with a period of about 54 A(ring) by the x-ray standing wave technique showed a ratio changing of the nickel layer, suggesting the diffusion of nickel atoms and formation of a nickel-carbon complex. Interface roughness was estimated from the calculation at bulk density of nickel to be about 10 A(ring), suggesting the diffusion of nickel.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.356056

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