Electronic Resource
Amsterdam
:
Elsevier
Microelectronic Engineering
1 (1983), S. 143-159
ISSN:
0167-9317
Keywords:
Auger electron microprobe
;
Microanalysis
;
X-ray microprobe
;
electron microscopy
;
secondary ion mass spectrometry
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(83)90026-6
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