ISSN:
1572-8986
Schlagwort(e):
“Cold” plasmas
;
plasma diagnostics
;
concentration of species
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Chemie und Pharmazie
,
Maschinenbau
,
Technik allgemein
Notizen:
Abstract Diagnostic techniques for low-pressure, “cold” plasmas have mostly been limited to emission and mass spectrometry. Herein, the techniques of gas-phase electron paramagnetic resonance and laser-induced fluorescence spectroscopy are briefly reviewed. Particular attention is paid to their attributes which make them good candidates for plasma diagnostic tools. It is found that gas-phase electron paramagnetic resonance can be used to determine and monitor the absolute concentration of a number of important plasma species, e.g., free radicals and atoms. Laser-induced fluorescence can also monitor, with even more sensitivity, but perhaps not so well absolutely, the concentrations of many plasma species, e.g., free radicals, metastable excited states, and molecular ions.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00566372
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