Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
66 (1995), S. 2200-2202
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Direct deposition of Mo microstructures on Si is demonstrated by photolytic decomposition of condensed Mo(CO)6 using the aperture-limited, high-intensity radiation from an undulator at the BESSY storage ring. A particular advantage of the instrument, a new photon-induced scanning Auger microscope, is the possibility of quasisimultaneous exposure (writing) and analysis employing photoemission (PES) or x-ray induced Auger spectroscopy (XAES) with sufficient energy resolution for detection of chemical differences. The present spatial resolution is 20–30 μm (for PES and writing) and 3 μm (for XAES), but this will be improved by adding focusing mirrors. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.113946
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