ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
CrNx film was widely used in mechanical engineering field because of its excellentanti-wear and corrosion resistance properties. While most of research was focused on mechanicalproperties, little attention had been paid to the corrosion resistance and residual stress of CrNx film .In this paper, CrNx films were deposited on silicon wafer (100) and iron substrate by unbalancedmagnetron sputtering system (UBMS) at different N2 flow. Then the structure, thickness, residualstress, micro-hardness, wear-resistance and anti-corrosion properties of CrNx films were investigated.The results showed that the phase composition of CrNx films transformed from Cr, single phase Cr2N,Cr2N and CrN coexist to single CrN with the N2 flow rate increasing. The CrNx films composed withCr2N phase, which deposited at 6 sccm N2 flow, had the highest microhardness and had highercompressive residual stress. Whereas the CrNx films with CrN and Cr2N phase coexist had the bestwear and corrosion resistance
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.373-374.176.pdf
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