ISSN:
1432-0630
Schlagwort(e):
68.55
;
72.80
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract p-Type polycrystalline diamond films were prepared by hot-filament CVD method using a liquid cyclic organic borinate ester as the doping source. The obtained films were identified as diamond films by means of SEM and Raman spectroscopy. The resistivity of the doped films can be adjusted by changing the temperature of the boron source.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00332575
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