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p-Type doping of diamond films with a novel organoboron source

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Abstract

p-Type polycrystalline diamond films were prepared by hot-filament CVD method using a liquid cyclic organic borinate ester as the doping source. The obtained films were identified as diamond films by means of SEM and Raman spectroscopy. The resistivity of the doped films can be adjusted by changing the temperature of the boron source.

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Authors and Affiliations

  1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Metallurgy, Chinese Academy of Sciences, 200050, Shanghai, People's Republic of China

    X. K. Zhang, J. G. Guo, Y. F. Yao, R. Wang & G. M. Chen

  2. Shanghai Institute of Organic Chemistry, Chinese Academy of Sciences, 200032, Shanghai, People's Republic of China

    W. K. Zhou & S. Yu

Authors
  1. X. K. Zhang
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  2. J. G. Guo
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  3. Y. F. Yao
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  4. R. Wang
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  5. G. M. Chen
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  6. W. K. Zhou
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  7. S. Yu
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Zhang, X.K., Guo, J.G., Yao, Y.F. et al. p-Type doping of diamond films with a novel organoboron source. Appl. Phys. A 56, 425–428 (1993). https://doi.org/10.1007/BF00332575

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  • DOI: https://doi.org/10.1007/BF00332575

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