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  • 1
    Electronic Resource
    Electronic Resource
    A comparison of the composition of thin films on substrates determined by EDX and surface analysis (1990)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 16 (1990), S. 163-167 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Single-scattering Monte Carlo electron trajectory simulation has been implemented for the calculation of characteristic x-ray production in thin films on substrates. The validity of the simulation has been verified by comparison with EDX results from various thicknesses of gold and silver films on silicon substrates over a range of electron energies. The simulation has been applied to binary thin films on substrates, and computational methods have been devised to eliminate the lengthy graphical techniques for film thickness and composition determination used previously. A comparison of calculated film compositions has been made with composition obtained by surface analytical techniques.
    Additional Material: 6 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740160132
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  • 2
    Electronic Resource
    Electronic Resource
    Structural and compositional studies of sputtered nickel ferrite filmsPaper presented at Ecasia 85, European Conference on Applications of Surface and Interface Analysis, Veldhoven, October 1985. (1986)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 8 (1986), S. 247-251 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The crystal structure, composition and surface composition of sputtered nickel ferrite films have been studied. The films have been prepared by sputtering in argon and reactively sputtering in oxygen from a nickel ferrite cathode and from an invar alloy cathode. Nickel ferrite has been identified as the main constituent of these films. XPS and AES have been used to study the surface composition of these sputtered films and NiFe2O4 and oxides and hydroxides of nickel and iron have been identified on the surface. Only films sputtered in argon from a nickel ferrite cathode were found to have the exact nickel ferrite composition. The deposition of these films onto single crystal MgO, a suitable substrate for epitaxial growth, has also been studied. AES results after annealing at 1000 °C indicate that for thin films, nickel and iron diffuse into the MgO substrate.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740080605
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  • 3
    Electronic Resource
    Electronic Resource
    An electron spectroscopy study of sputtered nickel ferrite films (1986)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 9 (1986), S. 333-333 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740090517
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  • 4
    Electronic Resource
    Electronic Resource
    The diffusion of copper and silver in amorphous chalcogenide thin films (1986)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 9 (1986), S. 334-334 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740090518
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  • 5
    Electronic Resource
    Electronic Resource
    Computer programs for surface analysis by SIMS and SNMS (1994)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 22 (1994), S. 69-74 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Programs which have been developed to enable the rapid identification and quantification of elemental and molecular ions in SIMS and SNMS (Sputtered Neutral Mass Spectrometry) are described. The efficiency of these programs in identifying elemental species and quantifying concentration has been tested with amorphous silicon nitride films. Silicon doped with boron by ion implantation and a range of cobalt-silicon alloys have been used to test quantification in SIMS by the ‘relative sensitivity factor’ (RSF) method and quantification in SNMS respectively. The concentration obtained for boron in silicon by the RSF method gave good agreement with the concentration obtained from the ion implantation flux. Accurate quantification results were also obtained from the SNMS data.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740220118
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  • 6
    Electronic Resource
    Electronic Resource
    A microbeam analytical study of a-C: H films (1990)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 16 (1990), S. 497-503 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Carbon films prepared by sputtering, ion beam deposition methods and chemical and physical vapour deposition methods have been studied by a range of microbeam analytical techniques. The presence of hydrogen and hydrocarbon components in these films has been established regardless of whether hydrocarbon gas is used in the deposition process. The α-carbyne and diamond modifications of carbon have been identified in some of these films. The sensitivity of these carbon films to electron and ion irradiation is discussed. The form of carbon bonding has been investigated by x-ray photoelectron spectroscopy.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.7401601104
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  • 7
    Electronic Resource
    Electronic Resource
    Application of AQUA and QUAX to matrix corrections in AES and XPS (1992)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 19 (1992), S. 200-204 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The rapid determination of surface composition from raw spectral data using interative procedures contained in the computer programs AQUA and QUAX is described. The establishment of this system of programs has required the compilation of library files of basic elemental data to enable the automatic execution of matrix calculations. This system has been designed so that the effect of different methods of calculation of attentuation length or backscatter factor on calculated matrix factor and final surface composition can be readily investigated. These calculations would be tedious without the use of the AQUA and QUAX computer surface analysis system. In this investigation matrix factors and surface compositions have been calculated for a number of materials, including NiFe and CuAg alloys. Application of the option in the QUAX program for standardless surface analysis by XPS has been investigated in GaNx(Oy) films.
    Additional Material: 7 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740190139
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  • 8
    Electronic Resource
    Electronic Resource
    Composition of thin surface layers obtained by X-ray photoelectron spectroscopyPaper presented at QSA-6, London, November, 1990. (1991)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 17 (1991), S. 320-324 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The surface composition of a solid may vary considerably from the bulk composition of the material. For example, surface contaminants such as carbon, oxygen, sulphur and chlorine can be present as a thin overlayer. Recently, procedures have been developed that enable determination of the composition, thickness and surface coverage of a thin overlayer on a surface from AES spectra. In the present work, a similar procedure has been developed for analysis of thin overlayers by XPS. The calculation deals with two possible situations, the overlayer either does or does not contain elements that occur in the underlying material. The composition, thickness and surface coverage of a number of overlayers have been investigated, including the surface contaminant layers on amorphous silicon films, a series of amorphous silicon nitride films with varying atomic ratios of silicon and nitrogen and vacuum-deposited gold films on amorphous silicon nitride substrates.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740170605
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  • 9
    Electronic Resource
    Electronic Resource
    Computer-Aided quantification of AES and XPS spectra (1989)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 14 (1989), S. 295-301 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: The uses of a computer-accessed database of elemental information relevant to quantitative interpretation of Auger electron and x-ray photoelectron spectra will be described. Such a database has been compiled containing data on some 70 elements for access via UCSD Pascal computer programs implemented on IBM-compatible microcomputers, Basic information required for the calculation of AES and XPS matrix factors is present in the database and routines for easy updating and extending of the information present are available. Programs for rapid calculation of the matrix factors needed for accurate quantification have also been developed to run in tandem with these library files. The simple data correction procedures present in these programs provide the analyst with a rapid method for obtaining an estimate of surface composition. Use of programs of this type help to prevent error by relying on the computer-accessed library files for elemental information, help to prevent duplication of effort, and are of use in introducing the new surface analyst to the theoretical background to quantification. Some simple examples of uses of the programs are given.
    Additional Material: 3 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740140605
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  • 10
    Electronic Resource
    Electronic Resource
    Quantification of amorphous SiC: H films using XPS and AES with three standardsPaper presented at the Quantitative Surface Analysis (QSA-5) Conference, London, 15-18 November 1988. (1989)
    Chichester [u.a.] : Wiley-Blackwell
    Surface and Interface Analysis 14 (1989), S. 376-380 
    Details
    ISSN: 0142-2421
    Keywords: Chemistry ; Polymer and Materials Science
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Physics
    Notes: Quantification has been achieved on a range of a-SiC: H films using the techniques of XPS and AES. The procedure of quantification, involving the use of three standards, four matrix factors and an effective matrix factor, is given. These results are compared with results from standless techniques. The correlation between matrix factors, local atomic bonding configurations and the effect on the deduced composition are discussed. Recommendations are made concerning the use of various quantification methods, and their inherent errors are discussed.
    Additional Material: 4 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/sia.740140614
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