ISSN:
0049-8246
Keywords:
Chemistry
;
Analytical Chemistry and Spectroscopy
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The stoichiometry and thickness of TiNxOy films has been determined by electron microprobe and nuclear microanalysis. The difficulty arising in the electron microprobe from the interference between NKα and TiLI lines has been overcome by using a suitable Monte Carlo computing scheme. This procedure takes into account the SiKα intensity which was found to be sensitive to composition and thickness of the overlying TiNxOy film. The good agreement between electron microprobe and nuclear microanalysis results indicate the validity of the method.
Additional Material:
2 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/xrs.1300120109
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