ISSN:
1432-0630
Schlagwort(e):
81.15
;
82.50
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract We have deposited thin metal films of Mo and W with sub-μm lateral resolution using the photodissociation of the carbonyls by the frequency doubled radiation of an Arion laser at cw and ps-pulse operation, respectively. In both regimes similar curves are obtained for the intensity dependence of the deposition rate. No difference was observed for the lateral resolution using cw or ps-pulse irradiation. Measurements of the deposition rate as a function of the spot size indicate that the decomposition occurs in the adsorbed phase.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00343423
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