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  • 42.55M  (1)
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    Electronic Resource
    Springer
    Applied physics 52 (1991), S. 78-81 
    ISSN: 1432-0630
    Keywords: 42.55M ; 81.15 ; 82.20
    Source: Springer Online Journal Archives 1860-2000
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics , Physics
    Notes: Abstract Kinetics of Au pyrolytic deposition from organic solutions of triphenyl phosphine complexes induced by a copper-vapor laser beam is studied experimentally. Activation energies T a and pre-exponential factors are determined for 7 different Au complexes. Measured T a values range from 1800 K to 9400 K. The average temperature of the GaAs wafer is found to be 70° C for a laser beam power of 10 mW.
    Type of Medium: Electronic Resource
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