ISSN:
1432-0630
Schlagwort(e):
42.55M
;
81.15
;
82.20
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Maschinenbau
,
Physik
Notizen:
Abstract Kinetics of Au pyrolytic deposition from organic solutions of triphenyl phosphine complexes induced by a copper-vapor laser beam is studied experimentally. Activation energies T a and pre-exponential factors are determined for 7 different Au complexes. Measured T a values range from 1800 K to 9400 K. The average temperature of the GaAs wafer is found to be 70° C for a laser beam power of 10 mW.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00323689
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