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  • American Institute of Physics (AIP)  (2)
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  • 1
    Electronic Resource
    Electronic Resource
    The 100-kV gas and metal ion source for high current ion implantation : Proceedings of the fourth International Conference on Ion Sources (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2422-2424 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The TITAN ion source is a new kind of source which can produce high current beams of both metal and gas ions simultaneously or separately. Ion beams of the elements Mg, Al, Ti, Ca, Cr, Fe, Co, Ni, Zn, Sn, Ta, Re, Y, C, He, N, Ar, and Xe have been generated. To obtain metal ions a vacuum arc is used in metal vapors created in "cathode spots.'' To obtain gas ions a contragated arc discharge in gas current is used. The source extraction voltage is controlled within 10–100 kV. The ion current of both gas and metal was (approximately-equal-to)1 A. The source operates in a frequency-pulse regime at a pulse-repetition frequency as high as 50 pps. At its normal operation the source provides a dose of 1016 ions/cm2 per minute on a 250-cm2 area surface. The source is constructed according to the program on development of new technologies and is intended for high current surface modification and production of exotic surface alloys. At present, TITAN ion sources are utilized to modify physical-mechanical parameters of different surfaces. Here we outline the ion source and its performance.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1143827
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    The "TITAN'' ion source (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 3119-3125 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: TITAN is a new type of ion source capable of generating high current, wide aperture beams of gas and metal ions from a broad range of elements: Mg, Al, Ti, Cr, Fe, Co, Ni, Sm, Zn, W, Pb, Ta, Re, Y, C, He, N, Ar, and Xe. A specific feature of the TITAN ion source is the use of two kinds of arc discharges, each with cold cathodes, to produce plasma for ion beam extraction. Metal ions are generated by means of the vacuum arc in the metal vapor formed in cathode spots. Gas ions, on the other hand, are provided by a low-pressure constricted arc discharge. In a pulsed mode of operation the extraction voltage of the source ranges from 10 to 100 kV. The pulsed beam current for gas and metal ions is on the order of 1 A at pulse repetition rates up to 50 pulses per second and pulse duration of ∼400 μs. For dc operation and at an extraction voltage up to 10 kV, the ion current is as high as hundreds of milliamperes. This work outlines briefly the ion source, its design, and certain physical peculiarities observed when a high current ion beam is generated and transported.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144765
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    Paper (German National Licenses)
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