ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Spatially and time-resolved detection of gallium atoms formed in the excimer-laser photochemical vapor deposition (CVD) process of trimethylgallium at 248 nm was made by the laser-induced fluorescence technique. The result shows the importance of chemically adsorbed species in the photo-CVD process. The presence of a thermally assisted effect in the photochemical decomposition was indicated.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.342489
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