Digitale Medien
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
70 (1999), S. 4732-4733
ISSN:
1089-7623
Quelle:
AIP Digital Archive
Thema:
Physik
,
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
A butterfly vane valve is described for the servo control of a gas or liquid flow. The valve is suitable for reactive species since nearly all wetted parts are Teflon. The valve is operated by a servo motor that is controlled by a dedicated microprocessor programmed in BASIC. The valve offers many other desirable features, including constant and relatively small surface area, low dead volume, high conductance in the full-open position, vacuum compatibility, firmware control, and scalability. © 1999 American Institute of Physics.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.1150137
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