ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Amorphous SixHy alloy films have been prepared by planar rf reactive magnetron sputtering with a wide range of electrical, optical, optoelectronic, and microstructural characteristics. The photoconductivity of the films is observed to depend sensitively on the microstructure. In particular, the interrelationship between the dark conductivity (σdark), the photoconductivity (σph), the photoconducting gain (σph/ σdark), and the optical band gap (Eg) of a film is strongly influenced by the microstructure. It is shown that films with a particular combination of σdark, σph, σph/ σdark, and Eg values can only be prepared with a specific type of microstructure.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.336896
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