Publication Date:
2019-07-13
Description:
A system to combine silicon formation, by hydrogen reduction of trichlorosilane, with the capability to replenish a crystal growth system is described. A variety of process parameters to allow sizing and specification of gas handling system components was estimated.
Keywords:
ENERGY PRODUCTION AND CONVERSION
Type:
NASA-CR-162270
,
DOE/JPL-955269-79-1
,
DRL-113
,
QPR-1
Format:
application/pdf
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