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Digitale Medien

Solid phase crystallization of thin films of Si prepared by plasma-enhanced chemical vapor deposition (1993)

Masaki, Y. ; LeComber, P. G. ; Fitzgerald, A. G.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 74 (1993), S. 129-134

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ISSN: 1089-7550

Quelle: AIP Digital Archive

Thema: Physik

Notizen: Solid phase crystallization of thin films of undoped amorphous Si prepared by plasma enhanced chemical vapor deposition has been studied by transmission electron microscopy (TEM). From the TEM images, the thermodynamic parameters for the amorphous and crystalline phases were extracted. These parameters were compared with those previously reported for evaporated, chemical vapor deposited, and self-implanted amorphous Si. We conclude that the thermodynamic parameters are very similar for different amorphous Si films, although the initial structure of the films is comparatively different from one to another. To explain this, the existence of an intermediate amorphous state is assumed and discussed.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1063/1.354144

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2

Digitale Medien

Microbeam analysis studies of the copper-silver interface (1993)

Fitzgerald, A. G. ; Watton, H. L. L. ; Moir, P. A.

Springer

Journal of materials science 28 (1993), S. 1819-1823

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ISSN: 1573-4803

Quelle: Springer Online Journal Archives 1860-2000

Thema: Maschinenbau

Notizen: Abstract Copper-silver bimetallic samples have been examined by microbeam analytical techniques. Composition studies have concentrated on the interface region between the two metals. In this region two distinct phases characteristic of a eutectic structure were observed by backscatter electron imaging in the SEM. X-ray microanalysis has shown that the eutectic is composed of a copper-rich and a silver-rich phase. The crystal structure and composition of the constituent phases of the eutectic material have been confirmed by electron diffraction studies of a thinned foil of the eutectic composition. The surface structure of ion-beam etched eutectic material has been examined at high resolution. The silver-rich constituent of the eutectic is found to etch preferentially. The surface composition of the eutectic has been explained in terms of this ion-beam-induced surface structure.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1007/BF00595751

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Digitale Medien

A comparison of the composition of thin films on substrates determined by EDX and surface analysis (1990)

Fitzgerald, A. G. ; Gillies, A. D. ; Watton, H. L. L.

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 16 (1990), S. 163-167

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ISSN: 0142-2421

Schlagwort(e): Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: Single-scattering Monte Carlo electron trajectory simulation has been implemented for the calculation of characteristic x-ray production in thin films on substrates. The validity of the simulation has been verified by comparison with EDX results from various thicknesses of gold and silver films on silicon substrates over a range of electron energies. The simulation has been applied to binary thin films on substrates, and computational methods have been devised to eliminate the lengthy graphical techniques for film thickness and composition determination used previously. A comparison of calculated film compositions has been made with composition obtained by surface analytical techniques.

Zusätzliches Material: 6 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/sia.740160132

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Digitale Medien

Composition of thin surface layers obtained by X-ray photoelectron spectroscopyPaper presented at QSA-6, London, November, 1990. (1991)

Watton, H. L. L. ; Fitzgerald, A. G. ; Moir, P. A.

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 17 (1991), S. 320-324

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ISSN: 0142-2421

Schlagwort(e): Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: The surface composition of a solid may vary considerably from the bulk composition of the material. For example, surface contaminants such as carbon, oxygen, sulphur and chlorine can be present as a thin overlayer. Recently, procedures have been developed that enable determination of the composition, thickness and surface coverage of a thin overlayer on a surface from AES spectra. In the present work, a similar procedure has been developed for analysis of thin overlayers by XPS. The calculation deals with two possible situations, the overlayer either does or does not contain elements that occur in the underlying material. The composition, thickness and surface coverage of a number of overlayers have been investigated, including the surface contaminant layers on amorphous silicon films, a series of amorphous silicon nitride films with varying atomic ratios of silicon and nitrogen and vacuum-deposited gold films on amorphous silicon nitride substrates.

Zusätzliches Material: 3 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/sia.740170605

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Digitale Medien

Application of AQUA and QUAX to matrix corrections in AES and XPS (1992)

Fitzgerald, A. G. ; Moir, P. A. ; Storey, B. E.

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 19 (1992), S. 200-204

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ISSN: 0142-2421

Schlagwort(e): Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: The rapid determination of surface composition from raw spectral data using interative procedures contained in the computer programs AQUA and QUAX is described. The establishment of this system of programs has required the compilation of library files of basic elemental data to enable the automatic execution of matrix calculations. This system has been designed so that the effect of different methods of calculation of attentuation length or backscatter factor on calculated matrix factor and final surface composition can be readily investigated. These calculations would be tedious without the use of the AQUA and QUAX computer surface analysis system. In this investigation matrix factors and surface compositions have been calculated for a number of materials, including NiFe and CuAg alloys. Application of the option in the QUAX program for standardless surface analysis by XPS has been investigated in GaNx(Oy) films.

Zusätzliches Material: 7 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/sia.740190139

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6

Digitale Medien

Computer programs for surface analysis by SIMS and SNMS (1994)

Fitzgerald, A. G. ; Watton, H. L. L. ; Storey, B. E. ; [weitere]

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 22 (1994), S. 69-74

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ISSN: 0142-2421

Schlagwort(e): Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: Programs which have been developed to enable the rapid identification and quantification of elemental and molecular ions in SIMS and SNMS (Sputtered Neutral Mass Spectrometry) are described. The efficiency of these programs in identifying elemental species and quantifying concentration has been tested with amorphous silicon nitride films. Silicon doped with boron by ion implantation and a range of cobalt-silicon alloys have been used to test quantification in SIMS by the ‘relative sensitivity factor’ (RSF) method and quantification in SNMS respectively. The concentration obtained for boron in silicon by the RSF method gave good agreement with the concentration obtained from the ion implantation flux. Accurate quantification results were also obtained from the SNMS data.

Zusätzliches Material: 4 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/sia.740220118

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7

Digitale Medien

A microbeam analytical study of a-C: H films (1990)

Fitzgerald, A. G. ; Henderson, A. E. ; Storey, B. E.

Chichester [u.a.] : Wiley-Blackwell

Surface and Interface Analysis 16 (1990), S. 497-503

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ISSN: 0142-2421

Schlagwort(e): Chemistry ; Polymer and Materials Science

Quelle: Wiley InterScience Backfile Collection 1832-2000

Thema: Physik

Notizen: Carbon films prepared by sputtering, ion beam deposition methods and chemical and physical vapour deposition methods have been studied by a range of microbeam analytical techniques. The presence of hydrogen and hydrocarbon components in these films has been established regardless of whether hydrocarbon gas is used in the deposition process. The α-carbyne and diamond modifications of carbon have been identified in some of these films. The sensitivity of these carbon films to electron and ion irradiation is discussed. The form of carbon bonding has been investigated by x-ray photoelectron spectroscopy.

Zusätzliches Material: 10 Ill.

Materialart: Digitale Medien

URL: http://dx.doi.org/10.1002/sia.7401601104

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