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Magnetically filtered low-loss scanning electron microscopy (1990)

Wells, Oliver C. ; LeGoues, Francoise K. ; Hodgson, Rodney T.

Woodbury, NY : American Institute of Physics (AIP)

Applied Physics Letters 56 (1990), S. 2351-2353

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ISSN: 1077-3118

Source: AIP Digital Archive

Topics: Physics

Notes: The resolution of the scanning electron microscope can be improved by mounting the sample in the high-field region of a condenser-objective lens. Low-loss electrons (LLEs) are scattered from the sample with an energy loss of less than a few percent of the incident energy. In the past, LLEs have been collected with a retarding-field energy filter. A way has been found to collect LLEs using a detector located within the magnetic field of the condenser-objective lens which provides the required energy-filtering action. This greatly simplifies the apparatus and makes it possible to obtain LLE images with less tilt of the specimen and with a higher beam energy than before.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.102914

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