ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Ion beam Figuring (IBF) of optical mirror is a polishing process based on CCOS with theapplication of ion sputtering effects. The material removal mechanism is in the atom scale, whichcan enhance the precision of the target surface to tens of nanometers. Without contact, this processcan also promote the subsurface quality. In this paper, the Ion Beam Figuring Machine (IBFM) isintroduced,which realizes the relative motion between the target surface and the ion source.Firstly, we describe the design method, the machine configuration and principal technicalparameters. With the configuration and motion ability described, we introduce different scanningmodes for surfaces of different scales respectively. Secondly presented is the precision analysismethod for IBFM. Based on the CCOS principle, the relation between the convergence rate andpositioning errors are deduced. This relation describes the precision requirement of machiningprocess. Finally, the postposition algorithm of IBFM is analyzed. According to coordinate transitionand rotation, the general transfer model for different scanning modes is given
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.756.pdf
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