Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
66 (1995), S. 5244-5248
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An ion-implantation system designed and fabricated indigenously is described. It consists of a versatile ion source, Einzel lens system, EXH velocity filter, dose measuring equipment, and target chamber. The ion-implantation system fabricated has been used to prepare ion-implanted luminescent phosphors by implanting Sb+ ions into CaS. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1146092
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