ISSN:
1063-7826
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract Kinetics of the decay of photoluminescence of Er impurity in the films of amorphous hydrogenated Si a-Si:H〈Er〉 was studied for the first time. The films were obtained either by cosputtering of Si and Er targets with the use of the technology of dc silane decomposition in a magnetic field (MASD) or by radio-frequency decomposition of silane. In the second case, an Er(TMHD)3 polymer powder was used as the source of Er. It is shown that, at room temperature, the a-Si:H〈Er〉 films obtained by the MASD method feature the characteristic times of Er photoluminescence decay equal to 10–15 µs, which is 20 times smaller than in the case of Er-doped crystalline Si (c-Si〈Er, O〉) as measured at liquid-nitrogen temperature. For the a-Si:H〈Er〉 films obtained by radio-frequency decomposition of silane, the decay times of Er photoluminescence amount to 2 µs. The difference in the photoluminescence decay times is related to dissimilarities in the local surroundings of Er atoms in the a-Si:H〈Er〉 films obtained by different methods.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1134/1.1187952
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