ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Despite great advancements in diamond thin film growth and deposition techniques,determination of the residual stress and Young’s modulus for diamond films has continued to be achallenge. The bulge test is a potentially powerful tool for characterizing the mechanical properties ofdiamond film. In a bulge tester, pressure is applied on a thin membrane and the out-of-planedeflection of the membrane center is measured. The Young’s Modulus and the residual stress aresimultaneously determined by using the load-deflection behavior of a membrane. By means ofelectron-enhanced hot filament chemical vapor deposition (HFCVD), a diamond film was depositedon silicon slice (100), and the free-standing window sample of diamond thin films was fabricated bymeans of photolithography and anisotropic wet etching. The deflection of the membranes is measuredusing a laser interferometry system. The elastic modulus and residual stress were measured using aself-designed bulge equipment. In addition, the distortion of diamond thin films under differentpressure was simulated using finite element analysis and the contrast was made with experimentaldata. The research indicated that the Young’s Modulus of diamond thin films is 937.8GPa and theresidual stress is -10.53MPa. The elastic modulus and the residual stress coincide with the report inthe literature and the value tested by X-ray diffraction, respectively. This method uses a simpleapparatus, and the fabrication of samples is very easy, and it has provided an effective means forprecise measure the mechanical properties of other thin films
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.329.545.pdf
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