ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Nanocrystalline diamond film is an excellent material for high-tech fields because of itsexcellent properties. In this paper, research was carried out on the synthesis and depositionmechanism of nanocrystalline diamond thick film in the self-made double bias hot filamentchemical vapor (HFCVD) deposited system. Double biases including positive bias on the gridelectrode on top of hot filaments and negative bias on the substrate were added to the HFCVDsystem. During the deposition, nucleation and growth stages were applied alternately to controlcrystalline size and improve quality. The mechanism of the deposition is discussed in detail in thispaper. The positive grid bias increases the active, decomposition and ionization of hydrogen andmethane molecules, while negative substrate bias helps positive carbon-containing ions bomb thesubstrate that leads to the high nucleation density of the diamond. Raman results show that the filmprepared has high quality. And SEM results show that the film’s grain size is less than 100nm withthickness of 50μm
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.532-533.121.pdf
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