Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
80 (2002), S. 1144-1146
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
We describe the role of the presence of hydrogen on the elastic properties of AlxOyHz (0.32≤x≤0.4; 0.54≤y≤0.6; 3×10−4≤z≤0.14) films. The films were deposited by reactive magnetron sputtering in an Ar/O2/H2O discharge and were studied by Rutherford backscattering spectrometry, nuclear resonance analysis, selected area electron diffraction, as well as nanoindentation. As the hydrogen concentration is increased from 0.03% to 13.9% the measured elastic modulus value is reduced by approximately 53%. The measured elastic modulus is in excellent agreement with our electronic structure calculations. The large scattering in the reported values of the elastic properties of amorphous alumina thin films can readily be understood by hydrogen incorporation during synthesis. © 2002 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1448389
Permalink
|
Location |
Call Number |
Expected |
Availability |