Electronic Resource
s.l. ; Stafa-Zurich, Switzerland
Advances in science and technology
Vol. 59 (Sept. 2008), p. 190-197
ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
Shape memory alloys are able to provide high work output when due to the martensitictransformation. Therefore, they are a promising candidate for actuation mechanisms in microsystems,e.g. in microvalves. Sputter deposited SMA thin films are already in use as free-standing films or ascomposites. Since it is also possible to deposit and structure the SMA composites on Si substrates byphotolithographic techniques, the fabrication process is compatible to MEMS and therefore mostfavorable for an number of applications. Superelastic shape memory materials are of special interest inmedical applications due to the large strains at constant stress and their biocompatibility. SuperelasticNiTi thin films have been fabricated by magnetron sputtering using cast melted targets. Special heattreatment was performed to adjust superelastic properties and transformation temperatures. Asuperelastic strain of up to 6.5% at 37°C was obtained. Although NiTi shows an excellentbiocompatibility enhanced antibacterial properties would significantly broaden its application range.Coatings containing Ag have already been used for this application. In order to apply this approach toTiNi-based alloys thin films of different TiNiAg compositions have been prepared by sputtering
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.59.190.pdf
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