ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
A series of diamond films have been grown, all at Tsub=1110 K and atomic H concentrations [H]=3×10−10 mol/cm3. The acetylene and methyl radical concentrations at the substrate surface were varied independently by factors of up to 4 and 10, respectively, by adjusting the pressure and the input methane concentration, and the effects of these variations on the Raman spectra were examined. The linewidth of the 1332 cm−1 diamond feature, the sp2 nondiamond carbon feature, and the luminescence yields all increased with increased [CH3]sub, but varying the [C2H2] had no observable impact. A quantitative relationship is provided between the sp2 content and [CH3]sub. The luminescence peak, which is the most sensitive feature to [CH3]sub, is due to an impurity from the filament. Using micro-Raman spectroscopy, large variations are found in the Raman spectra of adjacent crystals and within a single crystal. We attribute these fluctuations to inhomogeneous and anisotropic strains. © 1996 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.363111
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