ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
This paper reports results of the second SIMS round-robin study on GaAs impurity analysis in which 16 laboratories participated. Three different types of SIMS instruments, including Cameca IMS-3F or IMS-4F, Atomika ADIDA-3000 and Hitachi IMA-3, were used for this study. The specimens were cut from identical multielement-doped GaAs crystals and distributed as common standards for the quantitative impurity analyses. The interlaboratory deviations in quatitative results based on the common standards were found to be 10-20%, except for some low-concentration specimens and the results for zinc. This was approximately half of the corresponding results produced from standard specimens provided by the laboratories themselves. The interlaboratory deviations of relative ion intensity between impurity and matrix were 〈50% for those laboratories employing instruments of the same type, except for low-concentration specimens. These results show that quantitative analysis to an accuracy of 50% can be performed without standard specimens by utilizing relative sensitivity factors for each type of instrument.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740210104
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