ISSN:
1432-0630
Keywords:
PACS: 07.79; 07.79.c; 84.40
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
We report on novel developments in the field of gallium arsenide cantilevers with integrated tips for SPM applications. As a result of an intensive study of the gallium arsenide etching behavior we are able to adapt the tip shape to the requirements in SPM, for example, high aspect ratio, minimized radius of curvature, and low surface roughness. These cantilevers represent the basic sensor design for both passive as well as active scanning near-field probes. As a first approach, for an active SPM probe a Schottky diode integrated in the tip apex was produced. First results on the thermal and optical characterization of Schottky diode probes are presented. High-frequency measurements of a coplanar microwave guide made of semi-insulating GaAs in comparison to silicon were carried out. Additionally, concepts for a light-emitting diode and a laser diode integrated in a tip – a challenge for future concepts in SNOM – are discussed.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390051169
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