ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Electrical, morphological and chemical properties of nanolayered Au/Ti/Al ohmiccontacts with different Ti:Al ratio are investigated. Contact resistivities of 1.42×10-5 [removed info]⋅cm2 and1.21×10-5 [removed info]⋅cm2 are achieved for Au/Ti(70)/Al(30) and Au/Ti(30)/Al(70) contacts, respectively. Itis found that the Ti:Al ratio does not affect the lowest resistivity value but influences on the optimalannealing temperature at which it is obtained. The different optimal annealing temperature provokesdifferent element distributions and interface chemistry of the annealed contacts. An increase of theAl concentration in the contact composition causes essentially the surface morphology leading to anincrease in surface roughness of the as-deposited and annealed contacts
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/17/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.556-557.725.pdf
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