ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The photo-polymerization induced by Two-Photon Absorption (TPA) is tightly confinedin the focus because the efficiency of TPA is proportional to the square of intensity.Three-dimensional (3D) micro-fabrication can be achieved by controlling the movement of thefocus. Based on this theory, a system for 3D-micro-fabrication with femtosecond laser is proposed.The system consists of a laser system, a microscope system, a real-time detection system and a3D-movement system, etc. The precision of micro-machining reaches a level down to 700nmlinewidth. The line width was inversely proportional to the fabrication speed, but proportional tolaser power and NA. The experiment results were simulated, beam waist of 0.413μm and TPA crosssection of 2×10-54cm4s was obtained. While we tried to optimize parameters, we also did someresearch about its applications. With TPA photo-polymerization by means of our experimentalsystem, 3D photonic crystal of wood-pile structure twelve layers and photonic crystal fiber aremanufactured. These results proved that the micro-fabrication system of TPA can not only obtainthe resolution down to sub-micron level, but also realize real 3D micro-fabrication
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/14/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.532-533.568.pdf
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