ISSN:
1551-2916
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Rapid implementation of new materials into engineering systems may require a paradigm shift in our approach to materials research. One option is to obtain fundamental material properties from experimental systems that can also serve as devices. This concept is applied to the measurement of Young's modulus of a novel ceramic, a polymer-derived silicon carbonitride (SiCN), directly from the performance of a microelectromechanical system (MEMS) device. The device is an electrostatic actuator. The flexure resistance of the arms of the actuator is measured and analyzed for the elastic modulus of SiCN. The comparison between theory and experiment yields a value for Young's modulus in the range 130–155 GPa.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1151-2916.2003.tb03453.x
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