ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The work presents the results of quantitative evaluation of Auger electron spectra utilizing the heights of Auger peaks normalized with respect to the background inN(E)vs.E distribution curves. The quantification method used was verified on a series of semi-insulating polycrystalline silicon samples with a variable content of oxygen. The results obtained were compared with those yielded by other procedures of quantitative AES, and by secondary neutral mass spectrometry.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
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