ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A 775nm femtosecond laser is applied to single crystal silicon by direct-write processingin air. A series of holes are drilled with 150fs duration pulses, various numbers of laser pulses andlaser fluences on silicon wafer. Different laser parameters and material properties influence the sizeof fabricated holes. The diameter and depth of holes are gradually enlarged with the increase oflaser fluence and pulse number. The periodic ripple structure on silicon surface is found andexplained at the same time
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/53/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.339.136.pdf
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