Publication Date:
2019-07-13
Description:
The lanthanide trifluorides show promise as vacuum ultraviolet (VUV) coating materials. The optical properties of single-layer coatings vary with deposition temperature, and with ion-beam energy and current density. The optical constants, stoichiometry, durability, moisture adsorption, and crystallinity are studied for trifluoride films made under a variety of deposition conditions.
Keywords:
OPTICS
Type:
Current Developments in Optical Engineering II; Aug 18, 1987 - Aug 21, 1987; San Diego, CA; United States
Format:
text
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