Publication Date:
2014-08-19
Description:
Hf 0.5 Zr 0.5 O 2 films could show excellent ferroelectricity with a large remanent polarization (P r , 〉 16 μ C/cm 2 ) on TiN and Ir electrodes, but their P r decreased with the increasing thickness and monoclinic phase portion. The critical thickness for the degradation of the ferroelectricity of Hf 0.5 Zr 0.5 O 2 films was smaller on the Ir electrode than the TiN electrode. This was due to the formation of larger grains, favorable for the formation of the monoclinic phase, on the Ir electrode than on the TiN electrode. The oxygen supply from IrO x exaggerated the initial growth on the Ir electrode and formed the larger grains.
Print ISSN:
0003-6951
Electronic ISSN:
1077-3118
Topics:
Physics
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