ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A simple and practical approach to determine the composition of binary thin films by RBS is proposed. It is shown in the single collision approximation that the composition ratio m/n of a uniform binary film Am Bn is determined with sufficiently high accuracy by the ratio between the peak areas AA/AB in the RBS spectrum and that the ratio AA/AB is not essentially influenced by the energy of the incident ion beam, the thickness of the film or the stopping power. The factor that is most sensitive to the accuracy is shown to be the statistical error in the total counts of peak areas AA and AB. It is experimentally demonstrated with an Al—Cu alloy film deposited on polycarbonate that the composition can be determined within an error of 0.63%.
Additional Material:
8 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740180608
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