ISSN:
1432-0630
Keywords:
Surface analysis
;
Auger electron spectroscopy
;
Electron channeling pattern
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract In the scanning electron microscope the electron channeling patterns allow us to determine the orientation and quality of single crystal objects. If the Auger spectrometer is equipped with a scanning sample positioner, the electron channeling patterns can be observed with primary energies used in Auger spectroscopy, i.e. 0.5–5 keV.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00883746
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