ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract Deep proton irradiation in poly (methyl methacrylate) (PMMA) is a fabrication method for monolithic integrated micro optics which offers high stability and interesting autoalignment features. The process consists of three basic steps: irradiation of a PMMA substrate followed by either a development of the irradiated regions or a swelling of the irradiated regions by organic vapor or both applied to different regions. With this technique a variety of elementary refractive microoptical components and monolithically integrated combinations can be fabricated: microlenses, microprisms, beam splitters, fiber connectors with selfaligned microlenses on top of each fiber.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s005420050026
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