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  • 1
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 76 (2000), S. 46-48 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Spectroscopic rotating-analyzer ellipsometry employing a compensator was used to measure the ellipsometric angles and depolarization from 0.73 to 5.4 eV of commercial separation by implantation of oxygen wafers. The data were analyzed to find the thicknesses of the native oxide cap, the top Si layer, and the buried oxide (BOX). From the depolarization in the spectral region of interference fringes, we determine layer thickness nonuniformities. Although a reasonable agreement between the data can be found by describing the BOX with the optical constants of thermal oxide, it can be improved by modeling the BOX as an effective medium consisting of thermal oxide and amorphous Si. The physical justification for this model is the presence of Si islands near the BOX/substrate interface. We compare our ellipsometry results with a destructive analysis using electron microscopy and secondary ion mass spectrometry. © 2000 American Institute of Physics.
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 84 (1998), S. 6337-6344 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have examined the optical properties of self-assembled InAs quantum dots (QDs) grown on prepatterned GaAs(001) substrates with polarization sensitive and time-resolved cathodoluminescence (CL) imaging and spectroscopy techniques. The InAs QDs were formed using a novel application in self-assembled molecular beam epitaxial growth, which entailed the growth of InAs on preformed [11¯0]-oriented stripe mesas. Interfacet In adatom migration occurred along the stripe side-walls during growth, enabling the selective formation of linear arrays of InAs QDs on the stripe mesas. The total InAs deposition needed to induce the two-dimensional to three-dimensional morphology change on the stripes is less than that required to initiate QD formation on the unpatterned substrates. The QDs formed on the mesa top were found with a luminescence distribution redshifted relative to QDs in the valley region, indicating that QDs with a larger average size were formed on the mesa top. The lower density of QDs in the valley region led to a weaker emission and sharper δ-like transitions at lower beam currents, relative to emission from QDs on the mesa. CL imaging was employed to study the spatial distribution of luminescence and identified the presence of relatively small QDs situated near the edges of the valley region along the lower surface of the stripe edges. An excitation- and energy-dependent polarization anisotropy relative to the 〈110〉 directions was observed in CL emission. A polarization anisotropy reversal was found between CL from QDs on the mesa and in the valley regions, revealing the importance of the stress anisotropy in both the formation of QDs and their subsequent optical properties. The CL was examined as a function of temperature to evaluate the thermal re-emission of carriers and the associated activation energies. The carrier relaxation kinetics were studied with time-resolved CL to measure differences in the CL onset and decay rates for QDs in the valley and mesa regions. © 1998 American Institute of Physics.
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 82 (1997), S. 859-864 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Focused ion beam assisted chemical etching is examined as an ultrahigh vacuum compatible in situ direct-write approach to patterning substrates to create mesas with arbitrary shapes (i.e., sidewall angles) independent of crystallographic orientation. Ga+ ion beam assisted Cl2 etching of GaAs(001) is employed as a vehicle. A phenomenological model is used to predict mesa profiles as a function of ion beam conditions. Mesas created under various conditions are characterized via atomic force microscopy and good agreement is found between the measured and predicted profiles. Examination of the growth profile evolution on such mesas with as-patterned sidewall angles between ∼10° and ∼60° reveal that mesa top size reduction suitable for nanostructure fabrication on stripes oriented along the [11¯0] and [100] directions occurs only for as-patterned mesa sidewall angles greater than ∼19° and ∼45°, respectively, which are the angles subtended by the {114} and {101} facets that emerge during growth and cause mesa top pinch-off for the two mesa stripe orientations, respectively. An as-patterned surface roughness in the sidewall and valley regions of ∼20 nm is found to heal with typically ∼50 nm of GaAs buffer growth via molecular beam epitaxy. Cross-section transmission electron microscope studies evidence the high quality of growth on the mesas and the lack of extended defects in the as-patterned substrate as well as in the overlayers, thus making such in situ prepared mesas suitable for creation of nanostructures via the technique of size-reducing epitaxy. © 1997 American Institute of Physics.
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 3186-3195 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have examined the kinetics of carrier relaxation in GaAs/AlGaAs quantum wells (QWs), quantum wires (QWRs), and quantum boxes (QBs) with time-resolved cathodoluminescence (CL). In the cases of QWRs and QBs, the nanostructures were grown via a size-reducing growth approach on pre-patterned GaAs(001) substrates composed of stripes and mesas, respectively. The growth involved deposition of multiple GaAs/AlGaAs layers in order to establish both structural and optical markers which facilitated the identification of important features in transmission electron microscopy (TEM) and CL experiments. In TEM measurements, the lateral dimensions of the top-most GaAs layers in typical stripe and mesa structures comprising the QWRs and QBs delineate GaAs regions expected to exhibit 2D and 3D quantum confinement effects, respectively. Time-delayed CL spectra of all three structures reveal that the initial capture of carriers in the active regions occurs on a time scale less than the temporal resolution of the CL system, ∼100 ps, during the onset of luminescence. Hot carriers, as a result of re-emission out of thin QWs surrounding the QWRs and QBs, exhibit diffusive transport followed by relaxation into laterally confined regions which exhibit confined states of lower energy. This thermalization gives rise to a relatively slow onset and decay of luminescence attributed to the lowest energy optical transitions. By comparing time-resolved CL transients in these three structures, we find that the average luminescence onset and initial-decay rates both decrease as the dimensionality of the system reduces from 2D to 0D. These results demonstrate that the rate of carrier relaxation, including the re-emission and diffusive transport of carriers, will depend on details of the total surrounding structure which comprises the excitation region. © 1997 American Institute of Physics.
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 81 (1997), S. 1781-1784 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have examined carrier thermalization, recombination, and band filling in GaAs/AlGaAs quantum boxes with low-temperature cathodoluminescence (CL). The temperature dependence of the quantum box CL intensity for T≤ 90 K exhibits an Arrhenius behavior, as a result of carrier thermalization between the quantum box and surrounding barrier regions. The width of the quantum box luminescence is found to increase rapidly with an increasing excitation density and reveals an enhanced phase-space and real-space filling, in comparison to the behavior observed for quantum wells. © 1997 American Institute of Physics.
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  • 6
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 69 (1996), S. 665-667 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have examined the kinetics of carrier relaxation in three-dimensionally confined GaAs/AlGaAs layers obtained by growth on prepatterned GaAs(001) with time-resolved cathodoluminescence (CL). Time-delayed CL spectra at 87 K reveal that (i) relaxation of hot carriers into the largest 3D confined regions occurs on a time scale of a few hundred ps during the onset of luminescence, and (ii) the luminescence decay time also increases for these larger confined regions, owing to thermal reemission from QWs, diffusion across AlxGa1−xAs barriers, and carrier feeding from surrounding thinner QWs. © 1996 American Institute of Physics.
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  • 7
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 64 (1994), S. 2727-2729 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The substrate temperature and arsenic pressure dependence of the density of InAs three-dimensional (3D) islands formed on GaAs(100) is found to exhibit a behavior that cannot be reconciled within the currently popular view of MBE growth. Rather, either an arsenic coverage induced strain enhanced In migration or strain dependent arsenic incorporation at islands, or both, appear to be operative. Plan-view and cross-sectional transmission electron microscopy, including the nature of the Moiré fringes, are used to obtain cluster size distribution and demarcation between size regime for coherent versus incoherent islands. The results point to the possibility of realizing a regular array of quantum dots made of coherently strained 3D islands of uniform size via growth on prepatterned substrates.
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  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 72 (1998), S. 220-222 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The lattice-mismatch stress-induced two-dimensional-to-three-dimensional morphology change is combined with interfacet adatom migration to selectively assemble parallel chains of InAs islands on top of [11¯0] oriented stripe mesas of sub-100-nm widths on GaAs(001) substrates. On such mesa stripes, prepared in situ via size-reducing epitaxy, deposition of InAs amounts subcritical for island formation on planar GaAs (001) is shown to allow self-assembly of three, two, and single chains of InAs three-dimensional island quantum dots selectively on the stripe mesa tops for widths decreasing from 100 nm down to 30 nm. © 1998 American Institute of Physics.
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  • 9
  • 10
    Publication Date: 1997-02-15
    Print ISSN: 0021-8979
    Electronic ISSN: 1089-7550
    Topics: Physics
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