ISSN:
1572-8838
Keywords:
ruthenium/cobalt deposition
;
sulfate/sulfamate electrolyte
;
double-current pulse plating
;
modulated multilayers
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Electrical Engineering, Measurement and Control Technology
Notes:
Abstract Operating conditions for the production of thin coatings of ruthenium–cobalt alloys have already been achieved. The present work provides data on the electrodeposition of modulated ruthenium–cobalt alloys using a sulfate–sulfamate electrolyte and a double-current pulse plating technique. Alloy modulation was examined by glow discharge optical spectroscopy. Coulometric measurements during anodic dissolution of cobalt–ruthenium films make it possible to determine exactly the cobalt content and approximate amount of ruthenium in the films.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1018470122747
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