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  • 1
    Electronic Resource
    Electronic Resource
    Ceramic Electrode Materials for Electrostatic Chuck Applications (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Solid state phenomena Vol. 124-126 (June 2007), p. 791-794 
    Details
    ISSN: 1662-9779
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Physics
    Notes: In general, Electrostatic chuck (ESC) was used to fix and clamp the silicon wafer withelectrostatic force in the semiconductor fabrication process. Recently, due to their excellent chemicaland plasma stability and high thermal conductivity, sintered ceramics has been used as an insulatormaterial in the configuration of ESC. However, metals of high melting point, such as Mo, W, stillused for electrode materials. Because of the thermal mismatch between metal electrode and ceramicinsulator, micro cracks were produced at the interface during sintering process of ceramic or itsoperation process with high temperature, which leads to reduce the life time of ESC. To improve thecompatibility between metal and ceramic, mesh type metal electrode was used in ESC but this type ofelectrode results in inhomogeneous electrostatic force. Homogeneous clamping force is veryimportant to determine the final quality of semiconductor. We have investigated a ceramicelectrostatic chuck composed of conducting ceramic electrode of titanium nitride instead of metalelectrode. Aluminum nitride was added to titanium nitride to control the thermal expansioncoefficient. This composite electrode shows not only a good electrical conductivity but also anexcellent compatibility to dielectric layer. Compatibility between the electrode and dielectric layerenable to design the electrode with continuous sheet type which leads to homogeneous electrostaticforce. Electrostatic force of ceramic ESC with conducting ceramic electrode was about 1700gf/4inchwafer when the applied voltage was DC 3kV
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.124-126.791.pdf
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  • 2
    Electronic Resource
    Electronic Resource
    Synthesis and Characterization of PbSe Nanocrystals by a Microchannel Reactor (2007)
    s.l. ; Stafa-Zurich, Switzerland
    Solid state phenomena Vol. 124-126 (June 2007), p. 1285-1288 
    Details
    ISSN: 1662-9779
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Physics
    Notes: The synthesis of high-quality monodispersed nanocrystal is very important. Typicalsynthetic method is rapid nucleation by injection of an organometallic precursor into a solventmaintaining the reaction temperature. Since these methods are discontinuous processes, they are notefficient for large-scale production of monodisperse nanocrystals. In this study, continuousmicrochannel reaction technique is presented for synthesis of monodisperse lead selenidenanocrystals in a diphenyl ether as high-temperature organic media. The microchannel reactor wasused due to its possibility of continuous process and reproducibility of narrow size distribution innanocrystal synthesis. The synthesis was carried out in microchannel reactor (800 μm diameter) madefrom PTFE. Lead oleate and TOP-Se were used as organic precursor and diphenyl ether ashigh-temperature organic solvents. Lead selenide particles with a size of less than 10nm could becontinuously prepared by this method. The nanocrystals have been characterized by X-ray diffraction,TEM and optical absorption spectrometer
    Type of Medium: Electronic Resource
    URL: http://www.tib-hannover.de/fulltexts/2011/0528/02/23/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.124-126.1285.pdf
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  • 3
    Electronic Resource
    Electronic Resource
    Characterization of 28Si+ and 40Ar+ ion-implanted epitaxial ReSi2 films on an n-Si(100) substrate (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 74 (1993), S. 1046-1050 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The structural and electrical characteristics of 300 keV Si+ or 380 keV Ar+ ion-implanted epitaxial ReSi2 films grown on an n-Si(100) substrate have been studied by using 2 MeV 4He+ ion backscattering spectrometry, x-ray diffraction, high-resolution transmission electron microscopy, and electrical measurement. Ion implantation causes static disorder in the film, which overlap and grow to become an amorphous layer. The threshold dose for amorphizing the ReSi2 film is ∼5×1014/cm2 for 28Si+ and ∼1×1014/cm2 for 40Ar+. Although the resistivity of the implanted ReSi2 film decreases when the degree of disorder (or the implantation dose) is increased, the resistivity reaches a minimum value at a dose of ∼1×1015/cm2 for Si+ or ∼5×1014/cm2 for Ar+. The 28Si+-implanted amorphous ReSi2 films recovered original epitaxy after thermal annealing at 700 °C for 30 min in vacuum, as do the partly amorphized ReSi2 films by 40Ar+ implantation. On the other hand, those films fully amorphized by 40Ar+ implantation (dose≥1×1014/cm2) did not recover after thermal annealing, even when exposed to a temperature as high as 1000 °C for 30 min.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.354951
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  • 4
    Electronic Resource
    Electronic Resource
    Relationship among shock-wave velocity, particle velocity, and adiabatic exponent for dry air (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 1048-1050 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Based on detailed equation-of-state calculations, it is shown that the relationship between the shock-wave velocity Us and the particle velocity Up for shock-compressed dry air can be represented accurately by the linear relation Us = a(P0) + b(P0)Up in a wide range of Up (2≤Up≤9 km/s) and initial pressure P0 (10−6≤P0≤1 atm) where a and b are given by the cubic polynomials of log10P0. An accurate analytic expression for the adiabatic exponent is derived by utilizing the linear relation.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.349692
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  • 5
    Electronic Resource
    Electronic Resource
    Analysis of the hollow-fibre fermenter using ultrafiltration (1986)
    Springer
    Applied microbiology and biotechnology 24 (1986), S. 102-105 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Summary A mathematical model for the hollowfibre fermenter using ultrafiltration (Park and Kim 1985b) was developed to investigate the performance of the fermenter. The model describes the behavior of the reactor well, using three parameters: the Stanton number, the Damköhler number, and the ratio of ultrafiltration rate to outlet tube-side flow rate. The experimental result was compared with the model after adjustment of parameters.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01982550
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  • 6
    Electronic Resource
    Electronic Resource
    Hollow-fibre fermenter using ultrafiltration (1985)
    Springer
    Applied microbiology and biotechnology 22 (1985), S. 190-194 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Summary A novel bioreactor with hollow fibres was developed to facilitate substrate transfer across membrane walls as well as to retain a continuous cell growth in the shell side. Ultrafiltration was induced through membrane by pressurizing feed solution to the inside of a hollow fibre with inlet and outlet pumps. The ultrafiltrate accumulated outside the hollow fibres was recirculated through a reservoir where a part of solution containing cells and substrate was removed to keep the level of reservoir solution constant. Ethanol production by Saccharomyces cerevisiae was carried out to test the feasibility of this reactor. The productivity of this reactor was compared with that of a continuous stirred tank reactor (CSTR).
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00253608
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  • 7
    Electronic Resource
    Electronic Resource
    Analysis of the hollow-fibre fermenter using ultrafiltration (1986)
    Springer
    Applied microbiology and biotechnology 24 (1986), S. 102-105 
    Details
    ISSN: 1432-0614
    Source: Springer Online Journal Archives 1860-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Summary A mathematical model for the hollowfibre fermenter using ultrafiltration (Park and Kim 1985b) was developed to investigate the performance of the fermenter. The model describes the behavior of the reactor well, using three parameters: the Stanton number, the Damköhler number, and the ratio of ultrafiltration rate to outlet tube-side flow rate. The experimental result was compared with the model after adjustment of parameters.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF00938778
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  • 8
    Electronic Resource
    Electronic Resource
    Variable volume enzyme reactor with ultrafiltration swing: A theoretical study on CSTR case (1983)
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 29 (1983), S. 645-651 
    Details
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: A new membrane enzyme reactor system is proposed, and its performance is analytically and numerically examined by operational modes. This membrane-separated, two-compartmental reactor is operated in a cyclic manner such that ultrafiltration swing is induced either by a pulsatile flow or by an alternating pressure difference. Substrate and product solutins are permeable to the membrane while enzyme is impermeable. In one reservoir, enzyme solution is stored into which substrate is supplied by diffusion-coupled ultrafiltration and product is removed by the same mechanism into the substrate compartment, which is similar to CSTR in view of fluid mixing and continuous inlet-outlet flows, but differs from CSTR in a sense that reaction takes place only in the enzyme compartment.The governing model equations are derived and their analytical solutions are obtained for fast reaction and high ultrafiltration with first-order kinetics. In addition, nonlinear Michaelis-Menten kinetics problem is solved numerically. As a result, we have found that the system can increase the conversion substantially compared with previous diffusion-moderated enzyme reactors where diffusion very often can limit the extent of conversion.
    Additional Material: 9 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/aic.690290419
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  • 9
    Electronic Resource
    Electronic Resource
    Variable-volume hollow-fiber enzyme reactor with pulsatile flow (1983)
    Hoboken, NJ : Wiley-Blackwell
    AIChE Journal 29 (1983), S. 910-914 
    Details
    ISSN: 0001-1541
    Keywords: Chemistry ; Chemical Engineering
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Chemistry and Pharmacology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Hollow-fiber device has been used to investigate the effect of ultrafiltration swing on the performance of membrane-enzyme reactor. Experiments with β-galactosidase and ONPG have shown that bidirectional ultrafiltration induced by pulsatile flow gives rise to an increase in conversion relative to that obtained at steady operation without ultrafiltration swing. This increase apparently comes from the enhanced mass transfer due to ultrafiltration.
    Additional Material: 8 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/aic.690290606
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  • 10
    Electronic Resource
    Electronic Resource
    Dual aerobic hollow-fiber bioreactor for cultivation of Streptomyces aureofaciens (1985)
    New York, NY [u.a.] : Wiley-Blackwell
    Biotechnology and Bioengineering 27 (1985), S. 1012-1020 
    Details
    ISSN: 0006-3592
    Keywords: Chemistry ; Biochemistry and Biotechnology
    Source: Wiley InterScience Backfile Collection 1832-2000
    Topics: Biology , Process Engineering, Biotechnology, Nutrition Technology
    Notes: Streptomyces aureofaciens (ATCC 12416c) was grown in the interstitial region formed by a parallel arrangement of three hollow silicone tubules contained within a microporous polypropylene hollow fiber. Liquid-soluble nutrients were supplied by diffusion across the polypropylene fiber to the interstitial cell-containing region whereas air or oxygen was provided by diffusion from the silicone tubule lumina to the cell mass. In this bioreactor, S. aureofaciens grew to high cell densities (greater than 1011 cells/cm3) and the culture so-obtained continously synthesized the secondary metabolite tetracycline. The volumetric productivity of tetracycline based on the interstitial volume was 90 μg/ml/h and based on the total reactor volume was 5.5 μg/mL/h. The high surface area-to-volume ratio afforded by the cylindrical configuration together with spatially distinct conduits to continuously transport liquids and gases, each of which may be nutrients or products of biosynthesis, to or from a tissuelike cell mass provides an alternative to the conventional air- or oxygen-sparged fermentation vessel. High volumetric reactor productivities may be achieved by virute of the concentrated stationary cell mass and by the appropriate selection of fiber sizes and materials so as to ensure adequate supplies of liquid and gaseous substrates to, as well as removal of metabolites from, most cells in the culture. This reactor topology is quite general and may be adapted to most microbial as well as mammalian and plant cell systems.
    Additional Material: 10 Ill.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1002/bit.260270712
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