Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
60 (1992), S. 748-750
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Pairing of gold and platinum with phosphorus is examined. For this purpose, gold, respectively platinum, is diffused into silicon wafers, which contained phosphorus doped regions. A value of 1.0×1019 cm−3 at 900 °C is suggested for the equilibrium concentration of gold phosphorus pairs for a phosphorus concentration of 3.0×1020 cm−3. The pair-forming capability of platinum with phosphorus is found to be much smaller. The equilibrium concentration of platinum phosphorus pairs is less than 3×1017 cm−3. Deep level transient spectroscopy measurements show that gold does not penetrate a 14 μm thick phosphorus layer in 2 h and that the platinum concentration in the bulk is a factor of four smaller than in reference samples without phosphorus doping.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.106557
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