ISSN:
1432-0630
Keywords:
PACS: 07.10.Cm; 73.61.Ey; 61.16.Ch; 42.55.Px
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
Abstract. We propose to fabricate GaAlAs/GaAs multilayer microtips for scanning near-field optical microscopy (SNOM) using anisotropic etching. The etching was performed in a solution of H3PO4:H2O2:H2O operating at a temperature of 10 °C. We obtained pyramid-shaped microtips with four etched facets and with a radius of curvature at the apex that was lower than 50 nm.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/s003390050058
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